CESAR® 射频发生器
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产品名称:
CESAR® 射频发生器
产品型号:
CESAR133、CESAR136、CESAR1310、CESAR1312、CESAR1320、CE
产品展商:
利方达有限公司
简单介绍
强大而多功能的CESAR® 射频发生器可提供非常稳定的射频功率输送性能，以及一个多样化的模式选择，每种模式都具有一套独特的功能（2、4、13.56、27.12和40.68 MHz；0.3至5 kW；拥有多种用户界面和输入选择），从而使您能够选择一套特别适合您应用的组件——而无需定制发生器所需的漫长交付期。
CESAR® 射频发生器的详细介绍
我们针对高级等离子应用设计了一整系列的 CESAR® 射频发生器。针对不同频率和功率水平的该种发生器均已推出。CESAR® 射频发生器一定可以满足您最苛刻的要求。标准功能包括：多功能前面板、大的液晶显示屏、用户友好型软件、模拟和串行用户接口以及针对 VarioMatch? 网络的手动控制。CESAR 发生器获得了 CE 认证，而且还在紧凑、轻量型的设计中运用了经过实践检验的 E 级架构。模块化设计带来了成本上的优势，使这些坚固耐用发生器的价格非常具有吸引力。
优点:
●利用面向最主要应用的内置脉冲能提高控制水平
●能提高处理灵活性
●利用灵活的通讯功能能进行控制和监控
功能:
●多功能前面板
●脉冲模式：0到 30kHz
●更完善的操作功能表
●2个模拟用户端口
● RS-232 接口、以太网接口及 PROFIBUS 接口
应用领域:
●HDP-CVD
●PECVD
●刻蚀－ICP/RIE
●PVD
● 等离子清洗
举例：
Specification
| Frequency |
13.560 MHz +/- 0.005% |
Max output power
|
1000 W into a 50 Ω load |
| Min output power |
10 W into a 50 Ω load
|
Reflected power limit
|
200 W |
Delivered power into mismatch
|
20% depending on the load impedance |
Load impedance
|
50 Ω |
RF connector
|
50 Ω, N-type, female |
| RF power regulation mode |
P forward, P delivered, or DC selfbias voltage
|
| Regulation (of set point) |
1.0 or 0.1% of full-rated power, whichever is greater, into a 50 Ω load |
| Response time (ms) |
|
| Turn off/decay time (ms) |
|
Harmonics
|
-50 dBc at full-rated power |
| Spurious content |
-60 dBc max at full-rated power |
| Pulse mode |
Yes |
| Pulse repetition frequency |
|
Pulse duty cycle
|
1% to 99%
|
| Pulse RF envelope rise / fall time (ms) |
|
| CEX operation mode |
Yes |
CEX input signal as required
|
|
CEX output signal specifications
|
|
| CEX connector (50 Ω) |
|
| Display |
LCD graphic display
256 x 132 dots , black / white
|
Interlocks and Limits
| Reflected power |
Yes |
| Overtemperature |
Yes |
| Current limit |
Yes |
| DC overload |
Yes |
| RF power limit |
Yes |
Cooling
| Cooling |
Air cooling |
Air cooling requirement
|
118 m/h3 |
AC Power Line
| AC line voltage (1-phase) |
230 VAC (187 AC to 253 VAC)
|
AC line frequency
|
|
| AC line current (per phase) |
6.5 A nominal line, full power
|
AC input power
|
|
| Overcurrent limit (per phase) |
10 A to be created by user through fuse or circuit breaker |
Efficiency line to load
|
66% at full power, nominal line |
Power factor
|
97% to 99% at max power |
| AC mains connection |
|
Physical Specification
| Packaging |
|
| Mounting |
|
Weight
|
|
Clearance
|
60 mm (2.36") on each side for air flow into unit
|
Dimensions
|
88 mm (H) x 483 mm (W) x 500 mm (D)
3.46" (H) x 19" (W) x 19.69" (D)
|
User Port Options
Enter P/N generator description HERE.
| Interfaces |
Interlock
|
| |
Matching interface |
| |
Diagnostic interface |