质量流量控制器

2179A质量流量控制器是一种通用型弹性密封的质量流量控制器，它带有一个关闭阀，可在多种应用场合测量和控制气体的流量。配上合适的压力传感器，它还可以用作压力控制器。常闭的气密关闭阀门正向关闭时的泄漏量仅为4 x 10-9 scc/sec（He）。它具有数字和模拟两种模式，其精度为全量程的1％和读数的1％。2179具有很小的功耗：在常规直流±15V供电工作时，单元电流仅有100mA（在最初开机阶段为200mA）。

例：型号2179A00411CR16VXX                                                       采购序列号 

校准气体（SEMI气体编号）*

Helium, He                                                                                               001

Argon, Ar                                                                                                   004

Hydrogen, H2                                                                                          007

Nitrogen, N2                                                                                            013

Oxygen, O2                                                                                               015

校准流量SCCM－最大20000 （相当氮气）                                               

10                                                                                                             11C                      

20                                                                                                             21C                     

50                                                                                                             51C                     

100                                                                                                           12C                     

200                                                                                                           22C                     

500                                                                                                           52C                     

1000                                                                                                         13C                     

2000                                                                                                         23C                     

5000                                                                                                         53C                     

10000                                                                                                       14C                     

20000                                                                                                       24C                     

装配件

标配：（兼容）Swagelok^R 4VCR^R 凸接头                                               R                         

选配：（兼容）Swagelok^R 4VCO^R 凸接头                                              G                         

选配：（兼容）Swagelok^R 0.25英寸管道                                                 S                         

长度适配器 w/ 4 VCR 配件**                                                                     L         

长度适配器w/ 1/4" Swagelok 配件***                                                        W

阀门      

常闭                                                                                                                   1                         

连接器                                                                                                    

模拟型：

9针D型接口                                                                                                  A                         

15针D型接口                                                                                                B                         

15针边缘卡接口                                                                                          C                         

单元设备15针D型接口                                                                               N                         

Millpore15针D型接口                                                                                 T                         

数字型：

RS-485                                                                                                          5                         

DeviceNet                                                                                                     6                         

密封                                                                                                        

标配:Viton^R                                                                                                 V                  

选配:Neoprene^R                                                                                          N                  

选配:Buna N                                                                                               B                  

选配:Kalrez^R                                                                                               K                  

固化软件版本（仅对DeviceNet^TM）                                                              

除非特别说明，MKS将发运订货时的最新固化软件版本                   XX        

用于2179A的电缆线

CB147-12-10用来将2179 9针D型接口连接至PR4000, 146, 186, 246, 247, 167, 647

CB259-5-10用来将2179 15针D型接口连接至246, 247,                           

CB147-1-10用来将2179 15针D型接口连接至PR4000, 146, 186, 167, 647

CB259-10-10用来将2179 20针边缘卡接口连接至246, 247                            

CB147-7-10用来将2179 20针边缘卡接口连接至PR4000, 146, 186, 167, 647

*其他气体编号见附录B

** 1259C-XXXXX-RX的匹配长度

***1259C-XXXXX-SX的匹配长度