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1179A质量流量控制器

如果您对该产品感兴趣的话,可以
产品名称: 1179A质量流量控制器
产品型号: 1179A
产品展商: 利方达有限公司

简单介绍
1179A质量流量控制器是一种通用型的弹性密封的质量流量控制器, 其满量程范围从10 sccm-20 slm, 模拟和数字通讯口可选。

1179A质量流量控制器的详细介绍

1179A质量流量控制器是一种通用型的弹性密封的质量流量控制器,可在多种应用场合测量和控制气体的流量,特别是对可重复性要求高的场合。配上合适的压力传感器,它还可以作为压力控制器使用。

 

对于当今市场上的质量流量控制器,1179A质量流量控制器是格式适应功能的替代物。标准的3英寸底座使1179能够直接进行安装而无需改变现有的气体管道。它具有数字和模拟两种模式,其精度为全量程的1%和读数的  

1%。

 

 

例:型号1179A00411CR1A5VXX                                                     采购序列号 

 

 

校准气体(SEMI气体编号)*

Helium, He                                                                                                    001

Argon, Ar                                                                                                        004

Hydrogen, H2                                                                                               007

Nitrogen, N2                                                                                                 013

Oxygen, O2                                                                                                    015

 

 

校准流量SCCM-最大20000相当氮气)                                               

10                                                                                                             11C                      

20                                                                                                             21C                     

50                                                                                                             51C                     

100                                                                                                           12C                     

200                                                                                                           22C                     

500                                                                                                           52C                     

1000                                                                                                         13C                     

2000                                                                                                         23C                     

5000                                                                                                         53C                     

10000                                                                                                       14C                     

20000                                                                                                       24C                     

 

装配件(与以下兼容)

标配:(兼容)SwagelokR 4VCRR 凸接头                                               R                         

选配:(兼容)SwagelokR 4VCOR 凸接头                                              G                         

选配:(兼容)SwagelokR 0.25英寸                                                     S                         

长度适配器 w/ 4 VCR 配件**                                                                   L         

长度适配器w/ 1/4" Swagelok 配件***                                                      W

 

阀门

常闭                                                                                                            1                         

      

 

连接器                                                   
模拟型:

9D型接口                                                                                                 A           

15D型接口                                                                                               B                         

20针边缘卡接口                                                                                          C    

15D型变换接口(Brooks                                                                   E                  

单元设备15D型接口                                                                               N                         

Millpore15D型接口                                                                                 T                         

 

数字型:

RS-485                                                                                                         5                  

DeviceNet                                                                                                     6                         

 

 

密封                                                                                                        

标配: VitonR                                                                                              V                  

选配: NeopreneR                                                                                        N                  

选配: Buna N                                                                                             B                  

选配: KalrezR                                                                                            K                  

      

固化软件版本(仅对DeviceNetTM

除非特别说明,MKS将发运订货时的最新固化软件版本                           XX        

 

用于1179A的电缆线

CB147-12-10用来将1179 9D型接口连接至PR4000, 146, 186, 246, 247, 167, 647

CB259-5-10用来将1179 15D型接口连接至246, 247,                           

CB147-1-10用来将1179 15D型接口连接至PR4000, 146, 186, 167, 647

CB259-10-10用来将1179 20针边缘卡接口连接至246, 247                            

CB147-7-10用来将1179 20针边缘卡接口连接至PR4000, 146, 186, 167, 647           

 

 

 

*其他气体编号见附录B

** 1259C-XXXXX-RX的匹配长度

***1259C-XXXXX-SX的匹配长度

 



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