PEV-1压电阀技术参数

Valve type:                                  Piezoelectric crystal

Controllable gasses:                       Any compatible with materials

Flow range:                                 0‑500 SCCM

Closed leak rate:                          <1x10^‑9 scc/sec (1ATM HE ON INLET)

Response time:                            2 Millisec

Maximum inlet pressure:                 50 PSI

Drive requirement:                         Voltage: 0‑100 VDC, Current: <10µA

Maximum operating voltage 100 VDC

Crystal rated 120 VDC maximum

Operating temperature range:        +10°C to +60°C

Materials:                                     Stainless steel, viton, teflon, nickel plated crystal

Inlet and outlet connections:          7/16‑20 O ring ports per SAE J514 (STD fittings available)

Electrical connector:                      Standard BNC

Weight:                                       800 grams